منابع مشابه
Diffractive phase-shift lithography photomask operating in proximity printing mode.
A phase shift proximity printing lithographic mask is designed, manufactured and tested. Its design is based on a Fresnel computer-generated hologram, employing the scalar diffraction theory. The obtained amplitude and phase distributions were mapped into discrete levels. In addition, a coding scheme using sub-cells structure was employed in order to increase the number of discrete levels, thus...
متن کاملTiSi-nitride attenuating phase-shift photomask for 193 nm lithography
G. A. M. Reynolds, R. H. French, P. F. Carcia, C. C. Torardi, G. Hughes, D. J. Jones, M. F. Lemon, M. Reilly, L. Wilson, C. R. Miao “TiSi-nitride attenuating phase-shift photomask for 193 nm lithography”, 18th Annual BACUS Symposium on Photomask Technology and Management, SPIE Vol. 3546, Edited by B. J. Grenon, F. E. Abboud, 514-23, (1998). TiSi-nitride attenuating phase-shift photomask for 193...
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Inverse lithography technology (ILT) treats photomask design for microlithography as an inverse mathematical problem. We show how the inverse lithography problem can be addressed as an obstacle reconstruction problem or an extended nonlinear image restoration problem, and then solved by a level set time-dependent model with finite difference schemes. We present explicit detailed formulation of ...
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This paper presents some implementation details of a threephase to three-phase matrix converter prototype. The bidirectional semiconductor switches were built using discrete IGBTs and fast diodes. Design aspects such as protection against overvoltage and short-circuit, commutation process Artigo submetido em 23/04/2010 (Id.: 1132) Revisado em 18/09/2010, 15/07/2011, 30/08/2011 Aceito sob recome...
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Heat transfer phenomena in batch fluidized bed dryer have been studied and analyzed using three phase model including solid phase, interstitial gas phase and bubble phase based on Rizzi model. New correlations of heat transfer coefficient to surrounding and convection heat transfer coefficient between solid and interstitial gas are being proposed. In addition, some modifications have been d...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 1991
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.4.125